An imaging Mueller matrix ellipsometer is used to measure nanoscale line and grating structures in micron-sized measurement fields. To reconstruct the structural parameters from the ellipsometric data, numerical simulations using the finite element method were performed. The commercial FEM Maxwell solver JCMwsuite was employed to solve the inverse diffraction problem and to fit the measured Mueller matrix images by varying the simulation parameters in an optimization process.
J. Grundmann, et al. Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range. EPJ Web of Conferences 309, 02010 (2024).