The fabrication of nano-pillars with diameters up to 1000 nm by electron beam lithography and inductively coupled plasma reactive ions are used to build NV centers. The effect on the fluorescence into the objective is analyzed via simulations of the electromagnetic field using JCMsuite.
K. Volkova, et al. Optical and Spin Properties of NV Center Ensembles in Diamond Nano-Pillars. Nanomaterials, 12, 1516, (2022).
DOI: 10.3390/nano12091516