EUV scatterometry and grazing-incidence small-angle X-ray scattering (GISAXS) are compared for the parameter reconstruction of nanostructured surfaces. The reconstruction is based on a rigorous simulation with JCMsuite.
A. F. Herrero, et al. Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. Opt. Express, 29, 35580 (2021).
DOI: 10.1364/OE.430416